ДСТУ EN 60204-33:2014 Электрооборудование промышленных машин. Безопасность. Часть 33. Требования к оборудованию для изготовления полупроводников (EN 60204-33:2011, IDT)

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ПІДТВЕРДЖУВАЛЬНЕ ПОВІДОМЛЕННЯ

МІНІСТЕРСТВО ЕКОНОМІЧНОГО РОЗВИТКУ І ТОРГІВЛІ УКРАЇНИ

Наказ від 29.12.2014 № 1479

EN 60204-33:2011

Safety of machinery - Electrical equipment of machines -- Part 33:
Requirements for semiconductor fabrication equipment

прийнято як національний стандарт
методом «підтвердження» за позначенням

ДСТУ EN 60204-33:2014
(EN 60204-33:2011, IDT)

Електрообладнання промислових машин. Безпека. Частина 33. Вимоги
до устатковання для виготовлення напівпровідників

З наданням чинності від 2016–01–01

Відповідає офіційному тексту

З питань придбання офіційного видання звертайтесь
до національного органу стандартизації
(ДП «УкрНДНЦ» http://uas.org.ua)

CONTENTS

INTRODUCTION

1 Scope

2 Normative references

3 Terms and definitions

4 General requirements

4.1 General considerations

4.2 Selection of electrical equipment

4.3 Electrical supply

4.4 Physical environment and operating conditions

4.5 Transportation and storage

4.6 Provisions for handling

4.7 Installation

5 Incoming supply conductor terminations and devices for disconnecting and switching off

5.1 Incoming supply conductor terminations

5.2 Terminal for connection to the external protective earthing system

5.3 Supply disconnecting (isolating) device

5.4 Additional disconnecting devices

5.5 Protection against unauthorized, inadvertent and/or mistaken connection of plug/socket combination

6 Protection against electric shock

6.1 General

6.2 Protection against direct contact

6.3 Protection against indirect contact

6.4 Protection by the use of PELV

6.5 Protection of skilled persons and instructed persons against inadvertent contact with hazardous-live-parts

7 Protection of equipment

7.1 General

7.2 Overcurrent protection

7.3 Protection of motors against overheating

7.4 Motor overspeed protection

7.5 Abnormal temperature detection

7.6 Protection against supply interruption or voltage reduction and subsequent restoration

7.7 Earth fault/residual current protection

7.8 Phase sequence protection

7.9 Protection against overvoltages due to lightning and to switching surges

7.10 Electrolytic capacitors

8 Equipotential bonding

8.1 General

8.2 Protective bonding circuit

8.3 Functional bonding

8.4 Measures to limit the effects of high leakage current

9 Control circuits, emergency off (EMO), and protective interlock circuits

9.1 Control circuits

9.2 Emergency Off (EMO)

9.3 Operations other than emergency off

9.4 Protective interlocks

9.5 Suspension of safety functions and/or protective measures

10 Operator interfaces

10.1 General

10.2 Push-buttons

10.3 Indicator lights

10.4 Illuminated push-buttons

10.5 Rotary control devices

10.6 Start devices

10.7 Emergency off devices

10.8 Emergency stop devices

10.9 Enabling control device

11 Controlgear: location, mounting, and enclosures

11.1 General requirements

11.2 Location and mounting

11.3 Degrees of protection

11.4 Enclosures for electrical equipment

12 Conductors and cables

12.1 General requirements

12.2 Insulation

12.3 Current-carrying capacity

12.4 Conductor and cable voltage drop

12.5 Flexible cables

13 Wiring practices

13.1 Connections and routing

13.2 Multi-outlet assemblies

13.3 Plug/socket combinations

13.4 Identification of conductors

13.5 Wiring outside enclosures

13.6 Ducts, connection boxes and other boxes

14 Electric motors and associated equipment

14.1 General requirements

14.2 Remotely installed motors

14.3 Motor dimensions

14.4 Motor mounting and compartments

15 Accessories and lighting

15.1 Accessories

15.2 Local lighting of the fabrication equipment

16 Marking, warning signs and reference designations

16.1 General

16.2 Electric shock hazard warning signs

16.3 Functional identification

16.4 Equipment nameplate

16.5 Reference designations

17 Technical documentation

17.1 General

17.2 Information to be provided

17.3 Requirements applicable to all documentation

17.4 Installation documents

17.5 Overview diagrams and function diagrams

17.6 Circuit diagrams

17.7 Operating documentation

17.8 Maintenance documentation

18 Testing

18.1 General

18.2 Earthing continuity and continuity of the protective bonding circuit test

18.3 Touch current test for cord and plug connected electrical equipment

18.4 Dielectric test

18.5 Strain relief test

18.6 Power supply output short circuit test

18.7 Protective interlock circuit function test

18.8 Capacitor stored energy discharge test (see 6.2.4)

18.9 Temperature test

18.10 Strength of electrical enclosures test; 30 N steady force test

18.11 Strength of electrical enclosures test; 250N steady force test

18.12 Finger probe test

18.13 Wire flexing test

18.14 Insulation resistance tests

18.15 EMO functional test

18.16 Input current test

18.17 Other safety circuit tests

18.18 Motor temperature test

Annex A (normative) Basic protection (protection against indirect contact) in TN- systems

Annex B (normative) Protection against indirect contact in TT-systems (Derived from IEC 60364-4-41:2005 and IEC 60364-6:2006)

Annex C (normative) Conductor ampacity, and creepage and clearance distances

Annex D (normative) Standard test fingers

Annex E (informative) Types of system earthing (Derived from IEC 60364-1:2005)

Bibliography

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