ДСТУ CLC/TR 62258-3:2022 Напівпровідникові кристали. Частина 3. Рекомендації щодо належної практики поводження, пакування та зберігання (CLC/TR 62258-3:2007, IDT; IEC/TR 62258-3:2005, IDT)



ДСТУ CLC/TR 62258-3:2022
(CLC/TR 62258-3:2007, IDT; IEC/TR 62258-3:2005, IDT)

Напівпровідникові кристали.
Частина 3. Рекомендації щодо належної практики поводження,
пакування та зберігання

 
   
 
 
     
Не є офіційним виданням.
Офіційне видання розповсюджує національний орган стандартизації
(ДП «УкрНДНЦ» http://uas.gov.ua)

Contents

Foreword

INTRODUCTION

1 Scope and object

2 Normative references

3 Terms and definitions

4 Handling - Good practice

4.1 General

4.2 Working environmental controls

4.3 General handling precautions

4.4 Cleanroom good practice

5 Process handling issues

5.1 Wafer sawing

5.2 Die sorting

6 Die and wafer transport and storage media

6.1 Wafer carriers and cassettes

6.2 In-process carriers and transport systems

6.3 Packing for shipment of unsawn wafers

6.4 Packing for shipment of sawn wafers

6.5 Packing for shipment of single wafers

6.6 Packing for shipment of die using trays

6.7 Packing for shipment of die using tape-and-reel

6.8 Secondary packing for shipment

7 Storage good practice

7.1 Die and wafer storage

7.2 Short-term storage environment and conditions

7.3 Storage time limitations

7.4 Sawn wafer on wafer frame or ring

7.5 Die products in the production area

7.6 Die in tape-and-reel

7.7 Dry-packed die products

8 Traceability good practice

8.1 General

8.2 Wafer traceability

8.3 Die products traceability

8.4 Wafer and die back side marking

9 Guidelines for long-term storage (die banking) of bare die and wafers

9.1 General

9.2 Preparing for storage

9.3 Damage to die products during long-term storage

9.4 Long-term storage environment

9.5 Recommended inert atmosphere purity

9.6 Chemical contamination

9.7 Electrical effects

9.8 Protection from radiation

9.9 Periodic qualification of stored die products

10 Good practice for automated handling during assembly

10.1 Removal of die from shipping media

10.2 Equipment out of service

Annex A (informative) Planning checklist

Annex B (informative) Material specifications

Annex ZA (normative) Normative references to international publications with their corresponding European publications

Bibliography