ДСТУ EN 60749-28:2022 Напівпровідникові прилади. Методи механічних і кліматичних випробувань. Частина 28. Випробування на чутливість до електростатичного розряду (ESD). Модель зарядженого пристрою (CDM) - рів...



ДСТУ EN 60749-28:2022
(EN 60749-28:2017, IDT; IEC 60749-28:2017, IDT)

Напівпровідникові прилади. Методи механічних і кліматичних випробувань. Частина 28. Випробування на чутливість до електростатичного розряду (ESD). Модель зарядженого пристрою (CDM) - рівень пристрою

 
   
 
 
     
Не є офіційним виданням.
Офіційне видання розповсюджує національний орган стандартизації
(ДП «УкрНДНЦ» http://uas.gov.ua)

Contents

FOREWORD

INTRODUCTION

1 Scope

2 Normative references

3 Terms and definitions

4 Required equipment

4.1 CDM ESD tester

4.1.1 General

4.1.2 Current-sensing element

4.1.3 Ground plane

4.1.4 Field plate/field plate dielectric layer

4.1.5 Charging resistor

4.2 Waveform measurement equipment

4.2.1 General

4.2.2 Cable assemblies

4.2.3 Equipment for high-bandwidth waveform measurement

4.2.4 Equipment for 1,0 GHz waveform measurement

4.3 Verification modules (metal discs)

4.4 Capacitance meter

4.5 Ohmmeter

5 Periodic tester qualification, waveform records, and waveform verification requirements

5.1 Overview of required CDM tester evaluations

5.2 Waveform capture hardware

5.3 Waveform capture setup

5.4 Waveform capture procedure

5.5 CDM tester qualification/requalification procedure

5.5.1 CDM tester qualification/requalification procedure

5.5.2 Conditions requiring CDM tester qualification/requalification

5.5.3 1 GHz oscilloscope correlation with high bandwidth oscilloscope

5.6 CDM tester quarterly and routine waveform verification procedure

5.6.1 Quarterly waveform verification procedure

5.6.2 Routine waveform verification procedure

5.7 Waveform characteristics

5.8 Documentation

5.9 Procedure for evaluating full CDM tester charging of a device

6 CDM ESD testing requirements and procedures

6.1 Device handling

6.2 Test requirements

6.2.1 Test temperature and humidity

6.2.2 Device test

6.3 Test procedures

6.4 CDM test recording / reporting guidelines

7 CDM classification criteria

Annex A (normative) Verification module (metal disc) specifications and cleaning guidelines for verification modules and testers

A.1 Tester verification modules and field plate dielectric

A.2 Care of verification modules

Annex B (normative) Capacitance measurement of verification modules (metal discs) sitting on a tester field plate dielectric

Annex C (informative) CDM test hardware and metrology improvements

Annex D (informative) CDM tester electrical schematic

Annex E (informative) Sample oscilloscope setup and waveform

E.1 General

E.2 Settings for the 1 GHz bandwidth oscilloscope

E.3 Settings for the high-bandwidth oscilloscope

E.4 Setup

E.5 Sample waveforms from a 1 GHz oscilloscope

E.6 Sample waveforms from an 8 GHz oscilloscope

Annex F (informative) Field-induced CDM tester discharge procedures

F.1 General

F.2 Single discharge procedure

F.3 Dual discharge procedure

Annex G (informative) Waveform verification procedures

G.1 Factor/offset adjustment method

G.2 Software voltage adjustment method

G.3 Example parameter recording tables

Annex H (informative) Determining the appropriate charge delay for full charging of a large module or device

H.1 General

H.2 Procedure for charge delay determination

Annex I (informative) Electrostatic discharge (ESD) sensitivity testing direct contact charged device model (DC-CDM)

I.1 General

I.2 Standard test module

I.3 Test equipment (CDM simulator)

I.3.1 Test equipment design

I.3.2 DUT (device under test) support

I.3.3 Metal bar/board

I.3.4 Equipment setup

I.4 Verification of test equipment

I.4.1 General description of verification test equipment

I.4.2 Instruments for measurement

I.4.3 Verification of test equipment, using a current probe

I.5 Test procedure

I.5.1 Initial measurement

I.5.2 Tests

I.5.3 Intermediate and final measurement

I.6 Failure criteria

I.7 Classification criteria

I.8 Summary

Bibliography